February 22, 2025

Laser Irradiation Reduces Thermal Noise in MEMS Oscillators NTT and Northeastern University Technology

Nippon Telegraph and Telephone (NTT) and Tohoku University in Japan jointly implemented a "laser cooling method" that reduces the thermal noise of MEMS mechanical oscillators by irradiating laser light. MEMS oscillators are mainly used for sensors and signal transmitters, and this technology is expected to improve its accuracy.


(a) Microscope photographs (top view) and (b) experimental pattern diagrams (side view) of the fabricated mechanical oscillator.


Thermal noise spectrum. Thermal noise can be halved.

"Laser cooling" is a method in which an object releases energy by irradiating a laser to cool it. This time, the researchers used crystal growth technology to realize a 200-nm-thick two-layer semiconductor structure consisting of gallium arsenide (GaAs) and aluminum gallium arsenide (AlGaAs) with excellent optical and piezoelectric properties, which were machined using microfabrication technology. Oscillator. With sensitive light absorption characteristics, only light of a specific wavelength is absorbed, and the internal voltage generated at this time is used as a braking force against thermal vibration, thereby reducing thermal noise.

The mechanical oscillator produced this time was a plate spring having a length of 20 μm, a width of 14 μm, and a thickness of 0.4 μm. By simply irradiating the root of the oscillator with laser light, the thermal vibration can be halved.

Previously, laser cooling required the use of sophisticated optical resonators. This method does not require an optical resonator and can be used as a semiconductor integrated device. In the future, NTT and Tohoku University will further promote research to improve the cooling effect, integration with laser components, and work at room temperature.

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